The ST400 profilometer from Nanovea is designed to provide powerful and accurate surface profilometry combined with flexibility and a large open stage. The tool is easy to use and can combine a range of optional extras with standard or high speed profilometry.

Equipped with a 200mm x 150mm stage with interchangeable measurement sensors allowing measurement of a wide range of sample geometries both dull and reflective in finish.

Nanovea Inc are based in Irvine, a tech hub of Southern California. They have been redefining standards in quality control and materials development internationally for over a decade. Nanovea’s instruments can be found in renowned education and industrial organisations around the world.

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Key Features

  • 200mm x 150mm sample stage
  • 2D and 3D measurement
  • Robust and easy to use
  • Can measure both flat and curved samples using interchangeable measurement sensors
  • Can measure dull and reflective samples
  • Measurement across full stage range with no need for image stitching or refocusing
  • Powerful analysis software
  • Optional microscope
  • High speed sensors available

Surface Measurements

profilometry

3D non-contact profilometry can be used across a range of different applications to provide vital height data about your samples.

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How It Works

Chromatic Confocal technique uses white light that passes through a series of lenses with high degree of chromatic aberrations. Each wavelength will focus at a different distance creating the vertical measurement range. When a surface of interest is within the measurement range a single wavelength of the white light will be in focus while all others will be out of focus. Only the focused wavelength will pass through the pin hole filter to reach the CCD spectrometer. The physical wavelength measured corresponds to a vertical position. No complex algorithms are used to obtain the height value ensuring accurate results for all surface conditions unlike other techniques.

technique

Technical Specification

ST400 Base Specifications
X-Y Stage Travel 200mm x 150mm
Z-Axis Travel 50mm motorized (extra manual z-clearance is available)
X-Y Max Speed 40mm/s
Sensor Specifications – Standard Speed
Standard Speed  PS1 PS2 PS3 PS4 PS5 PS6
Max Height Range 110µm 300µm 1.1mm 3.5mm 10mm 24mm
Working Distance 3.35mm 10.8mm 12.0mm 16.2mm 25.9mm 20mm
Lateral X-Y Accuracy 0.9µm 1.2µm 2.0µm 3.0µm 7.0µm 8.0µm
Height Repeatability* 1.2nm 2.2nm 3.4nm 17nm 31nm 41nm
Sensor Specifications – High Speed
High Speed LS1 LS2 LS3
Max Height Range 200µm 0.95mm 3.9mm
Working Distance 5.3mm 18.5mm 41mm
Height Repeatability Ra* 14nm 21nm 70nm
Lateral Accuracy Of Each Point 1µm 2µm 5µm
Acquisition Rate (points per second) 384KHz 384KHz 384KHz

*Fixed point measurement on glass. Ra average height variation for 1,200 points (100 sampling).

Other Products in Range

Other instruments in the Nanovea profilometer range.

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